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| No. | Article |
|---|---|
| 1 |
Rugged Surface Polycrystalline Silicon Film Deposition and Its Application in a Stacked Dynamic Random-Access Memory Capacitor Electrode Ino M, Miyano J, Kurogi H, Tamura H, Nagatomo Y, Yoshimaru M Journal of Vacuum Science & Technology B, 14(2), 751, 1996 |