검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Multiselectivity Chemical Mechanical Polishing for NAND Flash Memories beyond 32 nm Park JH, Cui H, Cho JY, Hwang HS, Hwang WJ, Paik U, Kang HG, Kwak NJ, Park JG Journal of the Electrochemical Society, 157(6), H607, 2010 |
| 2 |
무전해 도금법으로 제조된 Co(Re,P) capping layer제조 및 특성 평가 한원규, 김소진, 주정운, 조진기, 김재홍, 염승진, 곽노정, 김진웅, 강성군 Korean Journal of Materials Research, 19(2), 61, 2009 |
| 3 |
Self assembled-monolayer(SAM)법을 이용한 TaN 확산방지막의 무전해 Cu 도금용 Pd seed layer 제조 및 특성 한원규, 조진기, 최재웅, 김정태, 염승진, 곽노정, 김진웅, 강성군 Korean Journal of Materials Research, 17(9), 469, 2007 |
| 4 |
Characteristics of the nanoscale titanium film deposited by plasma enhanced chemical vapor deposition and comparison of the film properties with the film by physical vapor deposition Lee JW, Kim SH, Kwak NJ, Lee YJ, Sohn HC, Kim JW, Sun HJ Journal of Vacuum Science & Technology B, 24(3), 1460, 2006 |