검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Effect of liner oxide densification on stress-induced leakage current characteristics in shallow trench isolation processing Park JH, Shin SW, Park SW, Kong YT, Kim DJ, Suh MS, Lee SC, Kwak NY, Dong CD, Kim DW, Lee GI, Kwon OJ, Yang HS Journal of the Electrochemical Society, 150(7), G359, 2003 |
| 2 |
Boron transport through surface channel pMOS using W-poly metal gate electrode - Poly Si doping condition and nitric oxide treatment effects Park SW, Kim DJ, Lee CH, Lee SC, Kwak NY, Shin SW, Park JH, Suh MS, Kong YT, Dong CD, Yang HS Journal of the Electrochemical Society, 149(8), G441, 2002 |
| 3 |
Improvement on the reliability of flash EEPROM by annealing after self-aligned source dry etching Park SW, Kim DJ, Dong CD, Kwak NY, Kong YT, Lee CH, Lee SC, Park SH, Kim JW, Yang HS Journal of the Electrochemical Society, 148(5), G291, 2001 |
| 4 |
Effect of annealing ambient on WSix(x=2.3) sidewall deformation and contact resistance in dichlorosilane-based W-polycide gate Park SW, Kim DJ, Dong CD, Kwak NY, Kong YT, Lee CH, Lee SC, Park SH Journal of Vacuum Science & Technology B, 19(4), 1186, 2001 |