검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Study of the evolution of nanoscale roughness from the edge of exposed resist to the sidewall of deep-etched lnP/InGaAsP heterostructures Jang JH, Zhao W, Bae JW, Adesida I, Lepore A, Kwakernaak M, Abeles JH Journal of Vacuum Science & Technology B, 22(5), 2538, 2004 |
| 2 |
Characterization of sidewall, roughness of InP/InGaAsP etched using inductively coupled plasma for low loss optical waveguide applications Bae JW, Zhao W, Jang JH, Adesida I, Lepore A, Kwakernaak M, Abeles JH Journal of Vacuum Science & Technology B, 21(6), 2888, 2003 |