검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Ultrathin Ta2O5 film capacitor with Ru bottom electrode Aoyama T, Yamazaki S, Imai K Journal of the Electrochemical Society, 145(8), 2961, 1998 |
| 2 |
Tantalum Oxide-Films on Silicon Grown by Tantalum Evaporation in Atomic Oxygen Hudner J, Hellberg PE, Kusche D, Ohlsen H Thin Solid Films, 281-282, 415, 1996 |
| 3 |
Tantalum Pentoxide for Advanced DRAM Applications Mckinley KA, Sandler NP Thin Solid Films, 290-291, 440, 1996 |
| 4 |
Ultrathin Tantalum Oxide Capacitor Process Using Oxygen-Plasma Annealing Kamiyama S, Suzuki H, Watanabe H, Sakai A, Kimura H, Mizuki J Journal of the Electrochemical Society, 141(5), 1246, 1994 |