검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Characteristics of Selective Chemical-Vapor-Deposition of Tungsten on Aluminum with a Vapor-Phase Precleaning Technology Chang KM, Yeh TH, Wang SW, Li CH Journal of the Electrochemical Society, 144(1), 251, 1997 |
| 2 |
Selective Tungsten CVD on Submicron Contact Hole Yeh WK, Chen MC, Wang PJ, Liu LM, Lin MS Thin Solid Films, 270(1-2), 462, 1995 |
| 3 |
Thermal-Stability of Alsicu/W/N(+)P Diodes with and Without Tin Barrier Layer Yeh WK, Chen MC, Wang PJ, Liu LM, Lin MS Thin Solid Films, 270(1-2), 526, 1995 |
| 4 |
The Surface-Chemistry and Kinetics of Tungsten Chemical-Vapor-Deposition and Selectivity Loss Creighton JR Thin Solid Films, 241(1-2), 310, 1994 |