검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Improving lithography pattern fidelity and line-edge roughness by reducing laser speckle Kritsun O, Lalovic I, Rokitski S, Partlo B, La Fontaine B, Farrar N, Levinson H Journal of Vacuum Science & Technology B, 26(6), 2145, 2008 |
| 2 |
Effects of chrome pattern characteristics on image placement due to thermomechanical distortion of optical reticles during exposure Abdo A, Capodieci L, Lalovic I, Engelstad R Journal of Vacuum Science & Technology B, 21(6), 3052, 2003 |