검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Resist effects at small pitches Van Steenwinckel D, Lammers JH, Koehler T, Brainard RL, Trefonas P Journal of Vacuum Science & Technology B, 24(1), 316, 2006 |
| 2 |
The effect of the solvent on the cross-link density of SiO2 coatings Mutter C, Bernards TNM, Peeters MPJ, Lammers JH, Bohmer MR Thin Solid Films, 351(1-2), 95, 1999 |