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| No. | Article |
|---|---|
| 1 |
Method for the Measurement of the Lateral Dose Distribution of Dopants at Implantation or Diffusion Mask Edges (Lateral SIMS) Voncriegern R, Jahnel F, Bianco M, Langegieseler R Journal of Vacuum Science & Technology B, 12(1), 234, 1994 |