검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Influence of the positive ion composition on the ion-assisted chemical etch yield of SrTiO3 films in Ar/SF6 plasmas Stafford L, Langlois O, Margot J, Gaidi M, Chaker M Journal of Vacuum Science & Technology A, 25(3), 425, 2007 |
| 2 |
Barium-strontium-titanate etching characteristics in chlorinated discharges Stafford L, Margot J, Langlois O, Chaker M Journal of Vacuum Science & Technology A, 21(4), 1247, 2003 |