검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Plasma enhanced atomic layer deposition of HfO2 and ZrO2 high-k thin films Lao SX, Martin RM, Chang JP Journal of Vacuum Science & Technology A, 23(3), 488, 2005 |
| No. | Article |
|---|---|
| 1 |
Plasma enhanced atomic layer deposition of HfO2 and ZrO2 high-k thin films Lao SX, Martin RM, Chang JP Journal of Vacuum Science & Technology A, 23(3), 488, 2005 |