화학공학소재연구정보센터
검색결과 : 11건
No. Article
1 Ultrasound to Enhance a Liquid-Liquid Reaction
Wilhelm AM, Laugier F, Kidak R, Ratsimba B, Delmas H
Journal of Chemical Engineering of Japan, 43(9), 751, 2010
2 SIMS depth profiling of boron ultra shallow junctions using oblique O-2(+) beams down to 150 eV
Juhel A, Laugier F, Delille D, Wyon C, Kwakman LFT, Hopstaken A
Applied Surface Science, 252(19), 7211, 2006
3 Growth of SiGe/Si superlattices on silicon-on-insulator substrates for multi-bridge channel field effect transistors
Hartmann JM, Holliger P, Laugier F, Rolland G, Suhm A, Ernst T, Billon T, Vulliet N
Journal of Crystal Growth, 283(1-2), 57, 2005
4 High germanium content SiGe virtual substrates grown at high temperatures
Bogumilowicz Y, Hartmann JM, Laugier F, Rolland G, Billon T, Cherkashin N, Claverie A
Journal of Crystal Growth, 283(3-4), 346, 2005
5 Backside and frontside depth profiling of B delta doping, at low energy, using new and previous magnetic SIMS instruments
Laugier F, Hartmann JM, Moriceau H, Holliger P, Truche R, Dupuy JC
Applied Surface Science, 231-2, 668, 2004
6 SIMS depth profiling of SiGe : C structures in test pattern areas using low energy cesium with a Cameca IMS Wf
Juhel M, Laugier F
Applied Surface Science, 231-2, 698, 2004
7 Comparison between Xe+ and O-2(+) primary ions, at low impact energy, on B delta-doping, SiGe-Si superlattice and Al/Ti multilayer structures
Laugier F, Holliger P, Dupuy JC, Baboux N
Applied Surface Science, 203, 348, 2003
8 Growth temperature dependence of substitutional carbon incorporation in SiGeC/Si heterostructures
Loup V, Hartmann JM, Rolland G, Holliger P, Laugier F, Semeria MN
Journal of Vacuum Science & Technology B, 21(1), 246, 2003
9 SiGe growth kinetics and doping in reduced pressure-chemical vapor deposition
Hartmann JM, Loup V, Rolland G, Holliger P, Laugier F, Vannuffel C, Semeria MN
Journal of Crystal Growth, 236(1-3), 10, 2002
10 Ultra-low energy SIMS analysis of boron deltas in silicon
Baboux N, Dupuy JC, Prudon G, Holliger P, Laugier F, Papon AM, Hartmann JM
Journal of Crystal Growth, 245(1-2), 1, 2002