검색결과 : 1건
No. | Article |
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1 |
Plasma Immersion Ion-Implantation for Semiconductor Thin-Film Growth Tuszewski M, Scheuer JT, Campbell IH, Laurich BK Journal of Vacuum Science & Technology B, 12(2), 973, 1994 |
No. | Article |
---|---|
1 |
Plasma Immersion Ion-Implantation for Semiconductor Thin-Film Growth Tuszewski M, Scheuer JT, Campbell IH, Laurich BK Journal of Vacuum Science & Technology B, 12(2), 973, 1994 |