검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Patterning-induced image placement distortions on electron beam projection lithography membrane masks Lercel M, Magg C, Lawliss M, Williams C, Caldwell N, Ackel R, Kindt L, Racette K, Reu P, Engelstad R, Mackay S Journal of Vacuum Science & Technology B, 19(6), 2671, 2001 |
| 2 |
Overlay Enhancement with Product-Specific Emulation in Electron-Beam Lithography Tools Puisto D, Sturans M, Lawliss M Journal of Vacuum Science & Technology B, 12(6), 3436, 1994 |