화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Bis(fluoroalcohol) monomers and polymers: Improved transparency fluoropolymer photoresists for semiconductor photolithography at 1.57 nm
Feiring AE, Crawford MK, Farnham WB, French RH, Leffew KW, Petrov VA, Schadt FL, Tran HV, Zumsteg FC
Macromolecules, 39(4), 1443, 2006
2 New amorphous fluoropolymers of tetrafluoroethylene with fluorinated and non-fluorinated tricyclononenes. Semiconductor photoresists for imaging at 157 and 193 nm
Feiring AE, Crawford MK, Farnham WB, Feldman J, French RH, Junk CP, Leffew KW, Petrov VA, Qiu WM, Schadt FL, Tran HV, Zumsteg FC
Macromolecules, 39(9), 3252, 2006
3 6 sigma and solid-state polymerization
Leffew KW, Yerrapragada SS, Deshpande PB
Chemical Engineering Communications, 188, 109, 2001