검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Anisotropic Reactive Ion Etching of Silicon Using SF6/O-2/Chf3 Gas Mixtures Legtenberg R, Jansen H, Deboer M, Elwenspoek M Journal of the Electrochemical Society, 142(6), 2020, 1995 |
| No. | Article |
|---|---|
| 1 |
Anisotropic Reactive Ion Etching of Silicon Using SF6/O-2/Chf3 Gas Mixtures Legtenberg R, Jansen H, Deboer M, Elwenspoek M Journal of the Electrochemical Society, 142(6), 2020, 1995 |