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| No. | Article |
|---|---|
| 1 |
Improved Epitaxial Layer Design for Real-Time Monitoring of Dry-Etching in III-V Compound Heterostructures with Depth Accuracy of +/-8 nm Vawter GA, Klem JF, Leibenguth RE Journal of Vacuum Science & Technology A, 12(4), 1973, 1994 |