검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
In-situ annealing characterization of atomic-layer-deposited Al2O3 in N-2, H-2 and vacuum atmospheres Broas M, Lemettinen J, Sajavaara T, Tilli M, Vuorinen V, Suihkonen S, Paulasto-Krockel M Thin Solid Films, 682, 147, 2019 |
| 2 |
MOVPE growth of N-polar AlN on 4H-SiC: Effect of substrate miscut on layer quality Lemettinen J, Okumura H, Kim I, Kauppinen C, Palacios T, Suihkonen S Journal of Crystal Growth, 487, 12, 2018 |
| 3 |
MOVPE growth of nitrogen- and aluminum-polar AlN on 4H-SiC Lemettinen J, Okumura H, Kim I, Rudzinski M, Grzonka J, Palacios T, Suihkonen S Journal of Crystal Growth, 487, 50, 2018 |