검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Optimization of ISBD embedded SiGe layers to prevent delamination process for MOSFET applications Wasyluk J, Ge Y, Wurster K, Lenski M, Reichel C Solid-State Electronics, 110, 23, 2015 |
| 2 |
Influence of gas phase chemistry on the properties of hydrogenated amorphous silicon and silicon-carbon alloys grown by HACVD Campo JMD, Lenski M, Comes FJ Thin Solid Films, 323(1-2), 115, 1998 |
| 3 |
Substrate-Temperature Dependent Photoelectrical and Structural-Properties of A-Si-H Deposited by Hydrogen-Assisted Chemical-Vapor-Deposition Lenski M, Comes FJ Thin Solid Films, 288(1-2), 337, 1996 |