검색결과 : 1건
No. | Article |
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1 |
Comparative studies of the feed gas composition effects on the characteristics of DLC films deposited by magnetron sputtering Libardi J, Grigorov K, Massi M, Otani C, Ravagnani SP, Maciel HS, Guerino M, Ocampo JMJ Thin Solid Films, 459(1-2), 282, 2004 |