검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Effect of Target Temperature on the Reactive DC-Sputtering of Silicon and Niobium Oxides Chan RY, Ho WS, Wolfe JC, Licon DL Thin Solid Films, 287(1-2), 57, 1996 |
| 2 |
Reactive Ion Etching of Silicon Stencil Masks in the Presence of an Axial Magnetic-Field Pendharkar SV, Wolfe JC, Rampersad HR, Chau YL, Licon DL, Morgan MD, Home WE, Tiberio RC, Randall JN Journal of Vacuum Science & Technology B, 13(6), 2588, 1995 |