검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Characterization of scratches generated by a multiplaten copper chemical-mechanical polishing process Teo TY, Goh WL, Lim VSK, Leong LS, Tse TY, Chan L Journal of Vacuum Science & Technology B, 22(1), 65, 2004 |
| 2 |
Impacts of buffer oxide layer in nitride/oxide stack gate dielectrics on the device performance and dielectric reliability Lin WH, Pey KL, Dong Z, Lim VSK, Chooi SYM, Zhou MS, Ang CH, Ang TC, Lau WS Electrochemical and Solid State Letters, 5(4), F7, 2002 |