검색결과 : 1건
No. | Article |
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1 |
Spectroscopic ellipsometry as a tool for on-line monitoring and control of surface treatment processes Eitzinger C, Fikar J, Forsich C, Humlicek J, Kruger A, Kullmer R, Laimer J, Lingenhole E, Muhlberger M, Muller T, Stori H, Wielsch U Materials Science Forum, 518, 423, 2006 |