검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Advanced chemical vapor deposition silicon carbide barrier technology for ultralow permeability applications Zambov L, Weidner K, Shamamian V, Camilletti R, Pernisz U, Loboda M, Cerny G, Gidley D, Peng HG, Vallery R Journal of Vacuum Science & Technology A, 24(5), 1706, 2006 |
| 2 |
Electrical characterization of semi-insulating 6H-SiC substrates Sanchez E, Wan J, Wang S, Loboda M, Li C, Skowronski M Materials Science Forum, 457-460, 669, 2004 |
| 3 |
Heteroepitaxial growth of SiC on Si(100) and (111) by chemical vapor deposition using trimethylsilane Madapura S, Steckl AJ, Loboda M Journal of the Electrochemical Society, 146(3), 1197, 1999 |