검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Correlation between surface damage and micro-defects in Si covered with insulating layer by implantation of He and H ions Liu CL, Li MK, Wang Z, Gao YJ, Liao JQ, Zhang DC, Zhang XL, Shen YY Thin Solid Films, 519(10), 3162, 2011 |