검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Influence of the electrode material on HfO2 metal-insulator-metal capacitors Wenger C, Lukosius M, Mussig HJ, Ruhl G, Pasko S, Lohe C Journal of Vacuum Science & Technology B, 27(1), 286, 2009 |
| 2 |
The role of the HfO2-TiN interface in capacitance-voltage nonlinearity of Metal-Insulator-Metal capacitors Wenger C, Lukosius M, Weidner G, Mussig HJ, Pasko S, Lohe C Thin Solid Films, 517(23), 6334, 2009 |
| 3 |
Metallorganic chemical vapor deposition of dysprosium scandate high-k layers using mmp-type precursors Van Elshocht S, Lehnen P, Seitzinger B, Abrutis A, Adelmann C, Brijs B, Caymax M, Conard T, De Gendt S, Franquet A, Lohe C, Lukosius M, Moussa A, Richard O, Williams P, Witters T, Zimmerman P, Heyns M Journal of the Electrochemical Society, 153(9), F219, 2006 |