검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Convection-assisted chemical vapor deposition (CoCVD) of silicon on large-area substrates Kunz T, Burkert I, Auer R, Lovtsus AA, Talalaev RA, Makarov YN Journal of Crystal Growth, 310(6), 1112, 2008 |
| 2 |
Kinetics of SiGe chemical vapor deposition from chloride precursors Lovtsus AA, Segal AS, Sid'ko AP, Talalaev RA, Storck P, Kadinski L Journal of Crystal Growth, 287(2), 446, 2006 |
| 3 |
Influence of silicon gas-to-particle conversion on SiCCVD in a cold-wall rotating-disc reactor Vorob'ev AN, Bogdanov MV, Komissarov AE, Karpov SY, Bord OV, Lovtsus AA, Makarov YN Materials Science Forum, 353-356, 107, 2001 |
| 4 |
Effect of gas-phase nucleation on chemical vapor deposition of silicon carbide Vorob'ev AN, Karpov SY, Zhmakin AI, Lovtsus AA, Makarov YN, Krishnan A Journal of Crystal Growth, 211(1-4), 343, 2000 |