검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Model database for determining dopant profiles from scanning capacitance microscope measurements Marchiando JF, Kopanski JJ, Lowney JR Journal of Vacuum Science & Technology B, 16(1), 463, 1998 |
| 2 |
Application of transmission electron detection to SCALPEL mask metrology Farrow RC, Postek MT, Keery WJ, Jones SN, Lowney JR, Blakey M, Fetter LA, Griffith JE, Liddle JA, Hopkins LC, Huggins HA, Peabody M, Novembre A Journal of Vacuum Science & Technology B, 15(6), 2167, 1997 |
| 3 |
Scanning Capacitance Microscopy Measurements and Modeling - Progress Towards Dopant Profiling of Silicon Kopanski JJ, Marchiando JF, Lowney JR Journal of Vacuum Science & Technology B, 14(1), 242, 1996 |
| 4 |
Junction Locations by Scanning-Tunneling-Microscopy - In-Air-Ambient Investigation of Passivated GaAs PN Junctions Tseng WF, Dagata JA, Silver RM, Fu J, Lowney JR Journal of Vacuum Science & Technology B, 12(1), 373, 1994 |