검색결과 : 7건
| No. | Article |
|---|---|
| 1 |
Chemical-mechanical polishing of SiOC organosilicate glasses: the effect of film carbon content Borst CL, Korthuis V, Shinn GB, Luttmer JD, Gutmann RJ, Gill WN Thin Solid Films, 385(1-2), 281, 2001 |
| 2 |
A new process for depositing tungsten nitride thin films Lu JP, Hsu WY, Luttmer JD, Magel LK, Tsai HL Journal of the Electrochemical Society, 145(2), L21, 1998 |
| 3 |
Thermal stability of Al/barrier/TiSix multilayer structures Lu JP, Hsu WY, Hong QZ, Dixit GA, Luttmer JD, Havemann RH, Chen PJ, Tsai HL, Magel LK Thin Solid Films, 320(1), 20, 1998 |
| 4 |
Integrated CVD-PVD Al plug processing for sub-half micron features Konecni A, Dixit G, Russell NM, Luttmer JD, Havemann RH Thin Solid Films, 320(1), 52, 1998 |
| 5 |
Integrated barrier/plug fill schemes for high aspect ratio Gb DRAM contact metallization Chen YP, Dixit GA, Lu JP, Hsu WY, Konecni AJ, Luttmer JD, Havemann RH Thin Solid Films, 320(1), 73, 1998 |
| 6 |
Effect of Ar Sputter Etch on the Texture of Ti and Al/Tin/Ti Metal Stack Hsu WY, Hong QZ, Liu HY, Douglas M, Taylor K, Magel LK, Luttmer JD, Havemann RH Journal of the Electrochemical Society, 144(9), L248, 1997 |
| 7 |
A Novel Process for Fabricating Conformal and Stable Tin-Based Barrier Lu JP, Hsu WY, Hong QZ, Dixit GA, Luttmer JD, Havemann RH, Magel LK Journal of the Electrochemical Society, 143(12), L279, 1996 |