검색결과 : 2건
No. | Article |
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1 |
Growth mechanism of TiN film on dielectric films and the effects on the work function Choi K, Lysaght P, Alshareef H, Huffman C, Wen HC, Harris R, Luan H, Hung PY, Sparks C, Cruz M, Matthews K, Majhi P, Lee BH Thin Solid Films, 486(1-2), 141, 2005 |
2 |
Surface potential and morphology issues of annealed (HfO2)(x)(SiO2)(1-x) gate oxides Ludeke R, Lysaght P, Cartier E, Gusev E, Chudzik M, Foran B, Bersuker G Journal of Vacuum Science & Technology B, 22(4), 2113, 2004 |