화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Growth mechanism of TiN film on dielectric films and the effects on the work function
Choi K, Lysaght P, Alshareef H, Huffman C, Wen HC, Harris R, Luan H, Hung PY, Sparks C, Cruz M, Matthews K, Majhi P, Lee BH
Thin Solid Films, 486(1-2), 141, 2005
2 Surface potential and morphology issues of annealed (HfO2)(x)(SiO2)(1-x) gate oxides
Ludeke R, Lysaght P, Cartier E, Gusev E, Chudzik M, Foran B, Bersuker G
Journal of Vacuum Science & Technology B, 22(4), 2113, 2004