검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Characterization of Cu(In,Ga)Se2 thin films prepared by RF magnetron sputtering using a single target without selenization Kong SM, Fan R, Jung SH, Chung CW Journal of Industrial and Engineering Chemistry, 19(4), 1320, 2013 |
| 2 |
Structural and electrical properties of radio frequency magnetron sputtered Cu(InxGa1-x)Se-2 thin films with additional post-heat treatment Jung SH, Fan R, Lee WI, Chung CW Thin Solid Films, 547, 86, 2013 |
| 3 |
Cobalt sputtering target and sputter deposition of Co thin films for cobalt silicide metallization Zhang H, Poole J, Eller R, Keefe M Journal of Vacuum Science & Technology A, 17(4), 1904, 1999 |
| 4 |
Monte-Carlo Numerical-Analysis of Target Erosion and Film Growth in a 3-Dimensional Sputtering Chamber Serikov VV, Nanbu K Journal of Vacuum Science & Technology A, 14(6), 3108, 1996 |
| 5 |
LaB6-Based, Zr-Alloyed, Decorative Hard Coatings Derflinger VH, Waldhauser W, Mitterer C, Schmolz P, Stori H Thin Solid Films, 286(1-2), 188, 1996 |