검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Simulations of BCl3/Cl-2 plasma in an inductively coupled gaseous reference cell Choi SJ, Veerasingam R Journal of Vacuum Science & Technology A, 16(3), 1873, 1998 |
| No. | Article |
|---|---|
| 1 |
Simulations of BCl3/Cl-2 plasma in an inductively coupled gaseous reference cell Choi SJ, Veerasingam R Journal of Vacuum Science & Technology A, 16(3), 1873, 1998 |