검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Application of dual-functional MoO3/WO3 bilayer resists to focused ion beam nanolithography Hashimoto M, Koreeda T, Koshida N, Komuro M, Atoda N Journal of Vacuum Science & Technology B, 16(5), 2767, 1998 |
| No. | Article |
|---|---|
| 1 |
Application of dual-functional MoO3/WO3 bilayer resists to focused ion beam nanolithography Hashimoto M, Koreeda T, Koshida N, Komuro M, Atoda N Journal of Vacuum Science & Technology B, 16(5), 2767, 1998 |