검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Kinetic study of CVD reaction by area-controlled CVD Mori N, Egashira Y, Ueyama K Journal of Chemical Engineering of Japan, 33(1), 32, 2000 |
| 2 |
Macro/microcavity method and its application in modeling chemical vapor deposition reaction systems Hong LS, Shimogaki Y, Komjyama H Thin Solid Films, 365(2), 176, 2000 |
| 3 |
Chemical reaction engineering in the design of CVD reactors Komiyama H, Shimogaki Y, Egashira Y Chemical Engineering Science, 54(13-14), 1941, 1999 |
| 4 |
The role of gas-phase reactions during chemical vapor deposition of copper from (hfac)Cu(tmvs) Chae YK, Shimogaki Y, Komiyama H Journal of the Electrochemical Society, 145(12), 4226, 1998 |
| 5 |
Mass-Spectrometric and Kinetic-Study of Low-Pressure Chemical-Vapor-Deposition of Si3N4 Thin-Films from Sih2Cl2 and NH3 Sorita T, Satake T, Adachi H, Ogata T, Kobayashi K Journal of the Electrochemical Society, 141(12), 3505, 1994 |