검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Formation of PTFE-like films in CF4 microwave plasmas Quade A, Polak M, Schroder K, Ohl A, Weltmann KD Thin Solid Films, 518(17), 4835, 2010 |
| 2 |
Numerical modeling of a He-N-2 capillary surface wave discharge at atmospheric pressure Petrov GM, Matte JP, Peres I, Margot J, Sadi T, Hubert J, Tran KC, Alves LL, Loureiro J, Ferreira CM, Guerra V, Gousset G Plasma Chemistry and Plasma Processing, 20(2), 183, 2000 |
| 3 |
Low temperature ZrB2 remote plasma enhanced chemical vapor deposition Pierson JF, Belmonte T, Czerwiec T, Hertz D, Michel H Thin Solid Films, 359(1), 68, 2000 |
| 4 |
Dual-Plasma Reactor for Low-Temperature Deposition of Wide Band-Gap Silicon Alloys Etemadi R, Godet C, Perrin J, Drevillon B, Huc J, Parey JY, Rostaing JC, Coeuret F Journal of Vacuum Science & Technology A, 15(2), 320, 1997 |
| 5 |
Low-Temperature Chlorine-Based Dry-Etching of III-V Semiconductors Pearton SJ, Abernathy CR, Kopf RF, Ren F Journal of the Electrochemical Society, 141(8), 2250, 1994 |