검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Optimization of the inlet velocity profile for uniform epitaxial growth in a vertical metalorganic chemical vapor deposition reactor Cho WK, Choi DH, Kim MU International Journal of Heat and Mass Transfer, 42(22), 4143, 1999 |
| 2 |
Improved GaN growth using a quasihot wall metal-organic chemical vapor epitaxy reactor Chung SR, Chen JC, Worchesky TL Journal of Vacuum Science & Technology A, 17(5), 3038, 1999 |
| 3 |
Modeling of Epitaxial Silicon Thin-Film Growth on a Rotating Substrate in a Horizontal Single-Wafer Reactor Habuka H, Nagoya T, Katayama M, Shimada M, Okuyama K Journal of the Electrochemical Society, 142(12), 4272, 1995 |