화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Nitric acid oxidation of Si (NAOS) method for low temperature fabrication of SiO2/Si and SiO2/SiC structures
Kobayashi H, Imamura K, Kim WB, Im SS, Asuha
Applied Surface Science, 256(19), 5744, 2010
2 Modeling effects of interface traps on the gate C-V characteristics of MOS devices on alternative high-mobility substrates
Satter MM, Haque A
Solid-State Electronics, 54(6), 621, 2010
3 Al2O3 formation on Si by catalytic chemical vapor deposition
Ogita YI, Iehara S, Tomita T
Thin Solid Films, 430(1-2), 161, 2003