검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Optimization of Electron-Cyclotron-Resonance Reactive Ion-Beam Etching Reactors for Dry-Etching of GaAs with Cl-2 Nishioka K, Sugiyama M, Nezuka M, Shimogaki Y, Nakano Y, Tada K, Komiyama H Journal of the Electrochemical Society, 144(9), 3191, 1997 |
| 2 |
Fabrication of Dry-Etched Mirrors for In0.20Ga0.80As/GaAs Wave-Guides Using an Electron-Cyclotron-Resonance Source Ko KK, Kamath K, Zia O, Berg E, Pang SW, Bhattacharya P Journal of Vacuum Science & Technology B, 13(6), 2709, 1995 |