검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Charting the future (and remembering the past) of optical lithography simulation Mack CA Journal of Vacuum Science & Technology B, 23(6), 2601, 2005 |
| 2 |
Modeling solvent diffusion in photoresist Mack CA, Mueller KE, Gardiner AB, Sagan JP, Dammel RR, Willson CG Journal of Vacuum Science & Technology B, 16(6), 3779, 1998 |