검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
High-resolution two-dimensional dopant characterization using secondary ion mass spectrometry Ukraintsev VA, Chen PJ, Gray JT, Machala CF, Magel LK, Chang MC Journal of Vacuum Science & Technology B, 18(1), 580, 2000 |
| 2 |
A new process for depositing tungsten nitride thin films Lu JP, Hsu WY, Luttmer JD, Magel LK, Tsai HL Journal of the Electrochemical Society, 145(2), L21, 1998 |
| 3 |
Thermal stability of Al/barrier/TiSix multilayer structures Lu JP, Hsu WY, Hong QZ, Dixit GA, Luttmer JD, Havemann RH, Chen PJ, Tsai HL, Magel LK Thin Solid Films, 320(1), 20, 1998 |
| 4 |
Effect of Ar Sputter Etch on the Texture of Ti and Al/Tin/Ti Metal Stack Hsu WY, Hong QZ, Liu HY, Douglas M, Taylor K, Magel LK, Luttmer JD, Havemann RH Journal of the Electrochemical Society, 144(9), L248, 1997 |
| 5 |
A Novel Process for Fabricating Conformal and Stable Tin-Based Barrier Lu JP, Hsu WY, Hong QZ, Dixit GA, Luttmer JD, Havemann RH, Magel LK Journal of the Electrochemical Society, 143(12), L279, 1996 |