검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Etch characteristics of CoFeB thin films and magnetic tunnel junction stacks in a H2O/CH3OH plasma Hwang SM, Garay A, Lee IH, Chung CW Korean Journal of Chemical Engineering, 31(12), 2274, 2014 |
| 2 |
Inductively coupled plasma reactive ion etching of magnetic tunnel junction stacks using H2O/CH4 mixture Lee TY, Lee IH, Chung CW Thin Solid Films, 547, 146, 2013 |