검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Etching silicon-containing bilayer resists in ammonia-based plasmas Panda S, Wise R, Mahorowala A, Balasubramanium V, Sugiyama K Journal of Vacuum Science & Technology B, 23(3), 900, 2005 |
| 2 |
Development of 157 nm positive resists Ito H, Wallraff GM, Fender N, Brock PJ, Hinsberg WD, Mahorowala A, Larson CE, Truong HD, Breyta G, Allen RD Journal of Vacuum Science & Technology B, 19(6), 2678, 2001 |