검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Role of H(2) in low temperature post-oxidation anneal for gate oxide on 6H-SiC Raineri V, Lombardo S, Musumeci P, Maktari AM, Calcagno L Materials Science Forum, 353-356, 639, 2001 |
| No. | Article |
|---|---|
| 1 |
Role of H(2) in low temperature post-oxidation anneal for gate oxide on 6H-SiC Raineri V, Lombardo S, Musumeci P, Maktari AM, Calcagno L Materials Science Forum, 353-356, 639, 2001 |