검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
High-resolution scanning spreading resistance microscopy of surrounding-gate transistors Alvarez D, Schomann S, Goebel B, Manger D, Schlosser T, Slesazeck S, Hartwich J, Kretz J, Eyben P, Fouchier M, Vandervorst W Journal of Vacuum Science & Technology B, 22(1), 377, 2004 |
| 2 |
Barrier Properties of Titanium Nitride Films Grown by Low-Temperature Chemical-Vapor-Deposition from Titanium Tetraiodide Faltermeier C, Goldberg C, Jones M, Upham A, Manger D, Peterson G, Lau J, Kaloyeros AE, Arkles B, Paranjpe A Journal of the Electrochemical Society, 144(3), 1002, 1997 |
| 3 |
Chemical-Vapor-Deposition of Copper from Cu-I Hexafluoroacetylacetonate Trimethylvinylsilane for Ultralarge Scale Integration Applications Braeckelmann G, Manger D, Burke A, Peterson GG, Kaloyeros AE, Reidsema C, Omstead TR, Loan JF, Sullivan JJ Journal of Vacuum Science & Technology B, 14(3), 1828, 1996 |