화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Highly doped Si and Ge formed by GILD (gas immersion laser doping); from GILD to superconducting silicon
Cammilleri D, Fossard F, Debarre D, Manh CT, Dubois C, Bustarret E, Marcenat C, Achatz P, Bouchier D, Boulmer J
Thin Solid Films, 517(1), 75, 2008
2 Localized laser thermal annealing of nanometric SiGe layers protected by a dielectric Bragg mirror
Cammilleri D, Fossard F, Halbwax M, Manh CT, Yam N, Debarre D, Boulmer J, Bouchier D
Thin Solid Films, 517(1), 327, 2008