검색결과 : 1건
No. | Article |
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1 |
Selective hemispherical grained polysilicon transformation for 256 MB, 1 GB dynamic random access memory and beyond Mansoori MM, Banerjee A, Shimizu A, Mori Y, Wise RL, Pas MF, Chatterjee B Journal of the Electrochemical Society, 146(10), 3827, 1999 |