검색결과 : 7건
| No. | Article |
|---|---|
| 1 |
Plasma-assisted growth of bilayer silicon-containing coatings for hardness and corrosion resistance Xiao ZG, Mantei TD Journal of Vacuum Science & Technology A, 22(4), 1124, 2004 |
| 2 |
Comparison of silicon dioxide layers grown from three polymethylsiloxane precursors in a high-density oxygen plasma Qi Y, Xiao ZG, Mantei TD Journal of Vacuum Science & Technology A, 21(4), 1064, 2003 |
| 3 |
Application-driven development of plasma source technology Hopwood J, Mantei TD Journal of Vacuum Science & Technology A, 21(5S), S139, 2003 |
| 4 |
Low-temperature plasma deposition of dielectric coatings from organosilicon precursors Lin CT, Li F, Mantei TD Journal of Vacuum Science & Technology A, 17(3), 735, 1999 |
| 5 |
Performance and Modeling of a Permanent-Magnet Electron-Cyclotron-Resonance Plasma Source Saproo A, Mantei TD Journal of Vacuum Science & Technology A, 13(3), 883, 1995 |
| 6 |
Low-Temperature Diamond Growth in a Pulsed Microwave Plasma Ring Z, Mantei TD, Thali S, Jackson HE Journal of Vacuum Science & Technology A, 13(3), 1617, 1995 |
| 7 |
Evaluation and Control of Device Damage in High-Density Plasma-Etching Gadgil PK, Mantei TD, Mu XC Journal of Vacuum Science & Technology B, 12(1), 102, 1994 |