화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Phase stepping microscopy for layer thickness measurement in silicon-on-insulator structures
Martin E, Sanz LF, Jimenez J, Perez-Rodriguez A, Morante JR, Aspar B, Margail J
Thin Solid Films, 311(1-2), 225, 1997
2 Silicon-on-Insulator Obtained by High-Dose Oxygen Implantation, Microstructure, and Formation Mechanism
Stoemenos J, Garcia A, Aspar B, Margail J
Journal of the Electrochemical Society, 142(4), 1248, 1995