검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Role of gas feed delivery and dilutent on oxide etching in an inductively coupled plasma etch system Lercel MJ, Dang D, Marmillion N, Mlynko W Journal of Vacuum Science & Technology A, 16(3), 1459, 1998 |
| No. | Article |
|---|---|
| 1 |
Role of gas feed delivery and dilutent on oxide etching in an inductively coupled plasma etch system Lercel MJ, Dang D, Marmillion N, Mlynko W Journal of Vacuum Science & Technology A, 16(3), 1459, 1998 |