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| No. | Article |
|---|---|
| 1 |
Preparation of Silicon Thin Films of Different Phase Composition from Monochlorosilane as a Precursor by RF Capacitive Plasma Discharge Mochalov LA, Kornev RA, Nezhdanov AV, Mashin AI, Lobanov AS, Kostrov AV, Vorotyntsev VM, Vorotyntsev AV Plasma Chemistry and Plasma Processing, 36(3), 849, 2016 |